This conference will bring together technology leaders from the major industry players and research institutes to discuss challenges, status of solutions, needed innovations and the ways forward for semicon metrology, contamination control and manufacturing.

The TNO Semicon Innovation Day will be focused around solutions on which TNO and its partners have been working in (near-field-) optics, (sub-surface) scanning probe microscopy, enabling opto-mechatronics and control innovations. It builds on and broadens the scope of our earlier ‘ERP 3D Nanomanufacturing Dissemination Workshops’.

For more information about the TNO Semicon Innovation Day read our program.

Accommodation

We would like to give you a suggestion if you need overnight accommodation
The Hampshire Hotel, Koepoortplaats 3, Delft city centre, is conveniently located within 14 minutes walking distance of the venue. There are a limited number of rooms at special room rates.
Please book as soon as possible to benefit from this offer!

Rooms can be reserved with the Hotel Reservations Department. Please mention the booking code TNO Semicon.
Telephone +31 (0)15 212 212 5
Fax: +31 (0)15 212 2125
E-mail reserveringen@hoteldelftcentre.nl

Contact us

If you have any questions, please contact Mrs Kitty van der Welle, e-mail info-semiconinnovation@tno.nl